Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition

Abstract

Three-dimensional nanostructure fabrication has been demonstrated by 30 keV Ga + focused ion beam assisted deposition using a aromatic hydrocarbon precursor. The characterization of depositedfilm on a silicon substrate was performed by a transmission microscope and Raman spectra. This result indicates that the depositionfilm is a diamondlike amorphous carbon. Production of three-dimensional nanostructure is discussed. Microcoil, drill, and bellows with 0.1 μm dimension were fabricated as parts of the microsystem. Furthermore, microstructure plastic arts is advocated as a new field using microbeam technology, presenting one example of a microwine glass with 2.75 μm external diameter and 12 μm height.