Optically excited self-resonant microbeams
- 1 March 1996
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 52 (1-3), 92-98
- https://doi.org/10.1016/0924-4247(96)80131-2
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
- Photothermal excitation and self-excitation of silicon microresonatorsSensors and Actuators A: Physical, 1993
- Mechanisms of optical activation of micromechanical resonatorsSensors and Actuators A: Physical, 1992
- Optical micromachined pressure sensor for aerospace applicationsOptical Engineering, 1992
- Optothermal drive of silicon resonators: The influence of surface coatingsSensors and Actuators A: Physical, 1990
- Self-excitation in fibre-optic microresonator sensorsSensors and Actuators A: Physical, 1990
- Optically excited resonant beam pressure sensorElectronics Letters, 1987
- Analysis of an interferometric optical fibre detection technique applied to silicon vibrating sensorsElectronics Letters, 1987
- Temperature dependence of resonant frequency in optically excited diaphragmsElectronics Letters, 1986
- Optical activation of a silicon vibrating sensorElectronics Letters, 1986
- Optically activated vibrations in a micromachined silica structureElectronics Letters, 1985