Tunable laser diode using a nickel micromachined external mirror
- 1 January 1996
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 32 (13), 1207-1208
- https://doi.org/10.1049/el:19960801
Abstract
A tunable laser diode has been made by using a nickel micro-external mirror which is actuated by an electrostatic comb-drive. The mirror was fabricated by nickel surface micromachining. Its displacement was ~10 µm with <2 nm accuracy. Wavelength tunability of ~20 nm can be obtained by controlling the external cavity.This publication has 4 references indexed in Scilit:
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