Photoluminescence studies on radiation enhanced diffusion of dry-etch damage in GaAs and InP materials
- 1 November 1996
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 14 (6), 3684-3687
- https://doi.org/10.1116/1.588750