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Effect of Microstructure on the Electromigration Life of Thin Film Al–Cu Conductors
Home
Publications
Effect of Microstructure on the Electromigration Life of Thin Film Al–Cu Conductors
Effect of Microstructure on the Electromigration Life of Thin Film Al–Cu Conductors
BA
B. N. Agarwala
B. N. Agarwala
BP
B. Patnaik
B. Patnaik
RS
R. Schnitzel
R. Schnitzel
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1 January 1972
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 9
(1)
,
283
https://doi.org/10.1116/1.1316581
Abstract
No abstract available
Keywords
MICROSTRUCTURES
THIN FILM
ELECTROMIGRATION
Cited by 7 articles