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Anomalous Boron Profiles Produced by BF 2 Implantation into Silicon
Home
Publications
Anomalous Boron Profiles Produced by BF 2 Implantation into Silicon
Anomalous Boron Profiles Produced by BF 2 Implantation into Silicon
TS
T. W. Sigmon
T. W. Sigmon
VD
V. R. Deline
V. R. Deline
CE
C. A. Evans
C. A. Evans
WK
W. M. Katz
W. M. Katz
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1 April 1980
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 127
(4)
,
981-982
https://doi.org/10.1149/1.2129801
Abstract
No abstract available
Cited by 13 articles