Low temperature (∼400 °C) growth of polycrystalline diamond films in the microwave plasma of CO/H2 and CO/H2/Ar systems
- 1 January 1991
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 9 (1), 76-84
- https://doi.org/10.1116/1.577134