Double 15-nm-wide metal gates 10 nm apart and 70 nm thick on GaAs

Publisher Website

1 November 1990

journal article
Published by American Vacuum Society in Journal of Vacuum Science & Technology B

Vol. 8 (6), 1919-1922
https://doi.org/10.1116/1.584874

Abstract

No abstract available

Keywords

Cited by 16 articles