Two-dimensional simulations of rf glow discharges inN2andSF6

Abstract

Two-dimensional numerical simulations of self-consistent rf glow discharges in ${\mathrm{N}}_2$ and ${\mathrm{SF}}_6$ gases are presented in this paper. Based on the single-moment fluid model, more accurate flux-corrected transport and reconstructed fast-Fourier-transform techniques are used to solve the continuity and Poisson’s equations, respectively. The evolution of electric fields, ion densities, and electron densities has been displayed by the spatiotemporal contours in a cylindrically symmetric geometry. The influence of gas properties (nonattaching versus strong attaching gas) and background pressures (1 and 2 Torr) are investigated. The sheath near the radial wall of the reactor has been shown its important role in the rf discharges, particularly in the strong attaching gas or at a higher background pressure.