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Complex formation and growth at the Cr– and Cu–polyimide interface
Home
Publications
Complex formation and growth at the Cr– and Cu–polyimide interface
Complex formation and growth at the Cr– and Cu–polyimide interface
RH
R. Haight
R. Haight
RW
R. C. White
R. C. White
BS
B. D. Silverman
B. D. Silverman
PH
P. S. Ho
P. S. Ho
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1 July 1988
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 6
(4)
,
2188-2199
https://doi.org/10.1116/1.575010
Abstract
No abstract available
Keywords
COMPLEX FORMATION
POLYIMIDE INTERFACE
FORMATION AND GROWTH
Cited by 163 articles