Evaluation of surface and subsurface cracks in nanoscale-machined single-crystal silicon by scanning force microscope and scanning laser microscope
- 30 April 2002
- journal article
- Published by Elsevier in Materials Characterization
- Vol. 48 (2-3), 141-145
- https://doi.org/10.1016/s1044-5803(02)00198-5
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
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- Ductile-Regime Grinding: A New Technology for Machining Brittle MaterialsJournal of Engineering for Industry, 1991
- Elastic/Plastic Indentation Damage in Ceramics: The Lateral Crack SystemJournal of the American Ceramic Society, 1982
- Elastic/Plastic Indentation Damage in Ceramics: The Median/Radial Crack SystemJournal of the American Ceramic Society, 1980