Diffusion of Zinc in Gallium Arsenide under Arsenic Vapor Pressure
- 1 July 1967
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 6 (7)
- https://doi.org/10.1143/jjap.6.848
Abstract
The deffusion of zinc into gallium arsenide in the arsenic vapor has been investigated by means of the radioactivation analysis. In the range of low zinc concentrations, the diffusion coefficient of zinc D was nearly independent of its concentrations and changed to be concentration-dependent at higher zinc concentrations. Over the whole range of zinc concentrations investigated, D was found to decrease as the arsenic vapor pressure increased. These results may be explained by assuming that zinc diffuses due to an arsenic divacancy mechanism as in the case of manganese diffusion in gallium arsenide.Keywords
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