Growth of cubic boron nitride coatings in a magnetic field enhanced r.f. glow discharge
- 30 April 1994
- journal article
- Published by Elsevier BV in Diamond and Related Materials
- Vol. 3 (4-6), 337-340
- https://doi.org/10.1016/0925-9635(94)90182-1
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
- Electron cyclotron resonance plasma deposition of cubic boron nitride using N-trimethylborazineSurface and Coatings Technology, 1993
- Preparation of c-BN containing films by reactive r.f. sputteringDiamond and Related Materials, 1993
- Deposition mechanisms for promoting sp3 bonding in diamond-like carbonDiamond and Related Materials, 1993
- Deposition of cubic boron nitride thin films by ion-beam-enhanced depositionDiamond and Related Materials, 1992
- Substrate temperature influence of c-BN thin film formation by IBEDDiamond and Related Materials, 1992
- Plasma Deposition, Properties and Structure of Amorphous Hydrogenated Carbon FilmsMaterials Science Forum, 1991
- Preparation of cubic boron nitride film by CO2 laser physical vapour deposition with simultaneous nitrogen ion supplyThin Solid Films, 1990
- Preparation of Cubic Boron Nitride Films by RF SputteringJapanese Journal of Applied Physics, 1990
- Ion beam deposition of special film structuresJournal of Vacuum Science and Technology, 1981
- The Chemical Deposition of Boron‐Nitrogen FilmsJournal of the Electrochemical Society, 1980