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One‐Micron Polycide (WSi2 on Poly‐Si) MOSFET Technology
Home
Publications
One‐Micron Polycide (WSi2 on Poly‐Si) MOSFET Technology
One‐Micron Polycide (WSi2 on Poly‐Si) MOSFET Technology
MT
M. Y. Tsai
M. Y. Tsai
HC
H. H. Chao
H. H. Chao
LE
L. M. Ephrath
L. M. Ephrath
BC
B. L. Crowder
B. L. Crowder
AC
A. Cramer
A. Cramer
RB
R. S. Bennett
R. S. Bennett
CL
C. J. Lucchese
C. J. Lucchese
MW
M. R. Wordeman
M. R. Wordeman
Publisher Website
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1 October 1981
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 128
(10)
,
2207-2214
https://doi.org/10.1149/1.2127219
Abstract
No abstract available
Cited by 45 articles