A study of the effect of ultrasonic agitation during development of poly(methylmethacrylate) for ultrahigh resolution electron-beam lithography
- 1 November 1995
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 13 (6), 3035-3039
- https://doi.org/10.1116/1.588317