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Epitaxial Deposition of GaAs in an Argon Atmosphere
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Epitaxial Deposition of GaAs in an Argon Atmosphere
Epitaxial Deposition of GaAs in an Argon Atmosphere
RT
R. C. Taylor
R. C. Taylor
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1 January 1967
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 114
(4)
,
410-412
https://doi.org/10.1149/1.2426610
Abstract
No abstract available
Keywords
GALLIUM ARSENIDE
SEMICONDUCTOR THIN FILMS
EPITAXIAL GROWTH
CHEMICAL VAPOUR DEPOSITION
GAS MIXTURES
HIGH-TEMPERATURE EFFECTS
CRYSTAL ORIENTATION
SURFACE MORPHOLOGY
CHEMICAL REACTIONS
CARRIER DENSITY
CARRIER MOBILITY
ELECTRICAL RESISTIVITY
Cited by 18 articles