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Low-temperature chemical vapor deposition of high purity copper from an organometallic source
Home
Publications
Low-temperature chemical vapor deposition of high purity copper from an organometallic source
Low-temperature chemical vapor deposition of high purity copper from an organometallic source
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David B. Beach
David B. Beach
FL
Francoise K. LeGoues
Francoise K. LeGoues
CH
Chao Kun Hu
Chao Kun Hu
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1 May 1990
journal article
Published by
American Chemical Society (ACS)
in
Chemistry of Materials
Vol. 2
(3)
,
216-219
https://doi.org/10.1021/cm00009a002
Abstract
No abstract available
Keywords
THIN FILM
COPPER
ANALYTICAL CHEMISTRY
DATA ANALYSIS
Cited by 67 articles