The behaviour of perfluoropolyether and other vacuum fluids under ion and electron bombardment
- 1 September 1973
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 111 (3), 555-560
- https://doi.org/10.1016/0029-554x(73)90216-4
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- The use of perfluoropolyether as a lubricant in vacuum systemsVacuum, 1973
- The use of perfluoropolyether fluids in vapour stream pumpsVacuum, 1972
- Perfluoropolyether—a Vacuum Pump Fluid resistant to Electron Induced PolymerizationNature, 1972
- The use of perfluoroaklyl polyether lubricants in mechanically driven vacuum pumpsVacuum, 1972
- The use of perfluoroalkyl polyether fluids in vacuum pumpsVacuum, 1971
- Comments on the paper `Scattering effects in ion beam exposure of photoresist polymer films'Journal of Physics D: Applied Physics, 1969
- Scattering effects in ion beam exposure of photoresist polymer filmsJournal of Physics D: Applied Physics, 1968
- The electrical properties of silicone films polymerized by electron bombardmentVacuum, 1964