Low-pressure RF discharge in the free-flight regime

Abstract

The self-consistent equations system for low-pressure RF discharge in the free-flight regime is formulated. The expressions for the electron energy diffusion coefficient due to electron-neutral collisions and to the electron collisions with the plasma-space charge moving boundary (stochastic heating) are derived. If the electron-neutral elastic collisions frequency exceeds the inelastic one, the conventional two-term approximation for the electron distribution function (EDF) can be generalized, and the space-time-averaged electron kinetic equation can be reduced to the one-dimensional energy diffusion one. The fast electrons attached to the electrode surface can also be accounted for in this equation. It is shown that in the cases of (a) spatially uniform ion profile, (b) for frequencies that are small compared with the electron bounce frequency, and (c) for frequencies exceeding the electron plasma one in the sheath, the stochastic heating vanishes.