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Titanium disilicide self-aligned source/drain + gate technology
Home
Publications
Titanium disilicide self-aligned source/drain + gate technology
Titanium disilicide self-aligned source/drain + gate technology
CL
C.K. Lau
C.K. Lau
YS
Y.C. See
Y.C. See
DS
D.B. Scott
D.B. Scott
JB
J.M. Bridges
J.M. Bridges
SP
S.M. Perna
S.M. Perna
RD
R.D. Davies
R.D. Davies
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1 January 1982
proceedings article
Published by
Institute of Electrical and Electronics Engineers (IEEE)
https://doi.org/10.1109/iedm.1982.190394
Abstract
No abstract available
Keywords
ALIGNED SOURCE/DRAIN
GATE TECHNOLOGY
TITANIUM DISILICIDE
DISILICIDE SELF ALIGNED
Cited by 35 articles