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Dimensional measurement of high aspect ratio micro structures with a resonating micro cantilever probe
Home
Publications
Dimensional measurement of high aspect ratio micro structures with a resonating micro cantilever probe
Dimensional measurement of high aspect ratio micro structures with a resonating micro cantilever probe
MY
M. Yamamoto
M. Yamamoto
HT
H. Takeuchi
H. Takeuchi
SA
S. Aoki
S. Aoki
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1 August 2000
journal article
Published by
Springer Nature
in
Microsystem Technologies
Vol. 6
(5)
,
179-183
https://doi.org/10.1007/s005429900037
Abstract
No abstract available
Keywords
HIGH ASPECT RATIO
THREE DIMENSIONAL
MICROSTRUCTURES
Cited by 30 articles