Electron-beam fabrication and microwave experiments on josephson microbridges

Abstract
Thin film superconducting microbridges which exhibit Josephson effects have been fabricated by electron-beam lithographic techniques. The experiments performed on these samples included the study of both the microwave-induced steps (at 35.80 GHz) in the I-V curves and the temperature dependence of the critical current near the superconducting transition temperature. The size of these rectangular bridges were measured by electron microscopy and had dimensions that were typically in the 0.1 to 0.4 μ range. Samples were fabricated using a variety of vacuum-evaporated metallurgies, e. g. Al, Sn, Pb and Nb. The fabrication technique affords the possibility of independently varying the length, width or thickness of the link. In this way, the turn-on of the Josephson effects or the transition from bulk-like superconducting properties to Josephson behavior can be studied. Thus for Nb links whose length and width were less than approximately 0.4 μ and whose thickness was about 0.1 μ, microwave-induced harmonic steps appear in the I-V curves in a range near Tc which satisfy the Josephson relation. As yet, no subharmonic steps have been observed. The sensitivity of the bridges to the rf power level appears to be quite high as will be discussed. Also as the size of these Nb samples is reduced, the behavior of the critical current near Tc also changes. An additional size effect is observed in some of the Nb bridges wherein the Tc of the link itself is reduced below that of bulk Nb. This effect will be discussed with reference to both sample size and fabrication parameters