Room temperature oxidation of silicon during and after etching
- 1 April 1965
- journal article
- Published by Elsevier in Journal of Physics and Chemistry of Solids
- Vol. 26 (4), 721-728
- https://doi.org/10.1016/0022-3697(65)90024-7
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
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- Theory of the oxidation of metalsReports on Progress in Physics, 1949
- The cause of the colours shown during the oxidation of metallic copperProceedings of the Royal Society of London. Series A, Containing Papers of a Mathematical and Physical Character, 1927