Optical properties of alumina and zirconia thin films grown by pulsed laser deposition
- 31 March 1998
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 100-101, 415-419
- https://doi.org/10.1016/s0257-8972(97)00661-0
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Pulsed laser deposition of electroceramic thin filmsApplied Surface Science, 1996
- The role of film re-emission and gas scattering processes on the stoichiometry of laser deposited filmsApplied Physics Letters, 1995
- Dynamics of laser ablation plume penetration through low pressure background gasesApplied Physics Letters, 1995
- Properties and applications of single-component (Al2O3, ZrO2, BN) and multi-component films (ZrO2, Ti) fabricated by pulsed laser depositionSurface and Coatings Technology, 1994
- Use of ion beam assisted deposition to modify the microstructure and properties of thin filmsInternational Materials Reviews, 1990
- Dynamics of zirconium oxide thin-film growth and ion-beam etchingPhysical Review B, 1987
- Modification of the optical and structural properties of dielectric ZrO2 films by ion-assisted depositionJournal of Applied Physics, 1984