On the use of the Brinkman cross section for sputtering yields of argon ions on a polycrystalline copper target
- 24 July 1978
- journal article
- Published by Elsevier in Physics Letters A
- Vol. 67 (2), 138-140
- https://doi.org/10.1016/0375-9601(78)90045-2
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Effect of temperature on the sputtering yield of copperSurface Science, 1976
- Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline TargetsPhysical Review B, 1969
- Sputtering Experiments with 1- to 5-keV Ar+ IonsJournal of Applied Physics, 1963
- Sputtering Yields of Metals for Ar+ and Ne+ Ions with Energies from 50 to 600 evJournal of Applied Physics, 1961
- Collection and sputtering experiments with noble gas ionsNuclear Instruments and Methods, 1961
- Sputtering of copper by bombardment with ions of 5–25 keVPhysica, 1960
- High-Energy SputteringJournal of Applied Physics, 1960
- Measurements and Collision—Radiation Damage Theory of High-Vacuum SputteringPhysical Review B, 1955