Arrhenius parameters for the reaction of H atoms with SiH4

Abstract

The reaction H+SiH₄ has been studied at 298–636 K in pulsed photolysis experiments with H atoms produced by the mercury-sensitised photolysis of H₂ and detected by Lyman-α absorption. The rate constants obtained are given by Combination of our results with previously reported data gives for the temperature range 290–636 K. Simulation of the observed dependence of the measured pseudo-first-order rate constant on the H atom concentration at 298 K and 500 Torr yields k₂=(4.3±1.0)×10^-11 cm³ s^-1 for the rate constant of the atom–radical reaction, H+SiH₃.