Study of Langmuir-Blodgett films for krypton monofluoride excimer laser resist

Publisher Website

1 January 1988

journal article
Published by American Chemical Society (ACS) in Langmuir

Vol. 4 (1), 195-200
https://doi.org/10.1021/la00079a036

Abstract

No abstract available

Keywords

LANGMUIR BLODGETT FILM

Cited by 6 articles