Spectroscopic measurements of phase-resolved electron energy distribution functions in RF-excited discharges
- 1 April 2004
- journal article
- Published by IOP Publishing in Europhysics Letters
- Vol. 66 (2), 232-238
- https://doi.org/10.1209/epl/i2003-10183-2
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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