X-ray study of CVD aluminium thin films deposited on silicon and quartz substrates
- 29 February 1980
- journal article
- Published by Elsevier in Materials Chemistry
- Vol. 5 (1), 19-28
- https://doi.org/10.1016/0390-6035(80)90032-2
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Aluminum coatings by the decomposition of alkylsThin Solid Films, 1977
- Evolution and Current Status of Aluminum MetallizationJournal of the Electrochemical Society, 1976