Modeling of low-pressure microwave discharges in Ar, He, and O/sub 2/: similarity laws for the maintenance field and mean power transfer
- 1 April 1991
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Plasma Science
- Vol. 19 (2), 229-239
- https://doi.org/10.1109/27.106818
Abstract
A kinetic study of low-pressure microwave discharges in Ar, He, and O/sub 2/ is carried out using electron-transport parameters and rate coefficients derived from solutions to the Boltzmann equation, together with the continuity and transport equations for the charged particles, taking into account stepwise-ionization processes. The Boltzmann equation is solved over a wide range of the applied frequency, omega /2 pi , but assuming that the angular frequency omega > tau /sub e//sup -1/, with tau /sub e/, denoting the characteristic time for electron-energy relaxation by collisions. The formulation provides discharge characteristics for the maintenance field and for mean absorbed power per electron in the three gases, which are shown to agree satisfactorily with experimental data obtained from surface-wave discharges. It is shown that such an agreement would not always be obtained without consideration of the role played by stepwise-ionization processes in sustaining the discharge.Keywords
This publication has 41 references indexed in Scilit:
- Quasi-neutral theory of positive columns in electronegative gasesJournal of Physics D: Applied Physics, 1988
- A survey of the numerical methods currently in use to describe the motion of an electron swarm in a weakly ionized gasTransport Theory and Statistical Physics, 1986
- Plasmas Sustained by Surface Waves at Microwave and RF Frequencies: Experimental Investigation and ApplicationsPublished by Springer Nature ,1986
- Comparisons between different methods of solution of the Boltzmann equation adapted to the calculation of swarm parameters in a weakly ionised mediumJournal of Physics D: Applied Physics, 1984
- A measurement of the electron impact ionization cross section of helium atoms in metastable statesJournal of Physics B: Atomic and Molecular Physics, 1976
- Scattering of 4.5 eV electrons by ground (X3Σg-) state and metastable (a1Δg) oxygen moleculesJournal of Physics B: Atomic and Molecular Physics, 1975
- Excitation of the Oi() and Ni() Resonance States by Electron Impact on O and NPhysical Review A, 1971
- Laboratory studies of electron attachment and detachment processes of aeronomic interestCanadian Journal of Chemistry, 1969
- Scattering of Electrons by C, N, O, , , andPhysical Review B, 1969
- Ionization of Atomic Oxygen on Electron ImpactPhysical Review B, 1959