High‐Speed Roll‐to‐Roll Nanoimprint Lithography on Flexible Plastic Substrates
Top Cited Papers
- 4 June 2008
- journal article
- research article
- Published by Wiley in Advanced Materials
- Vol. 20 (11), 2044-2049
- https://doi.org/10.1002/adma.200702650
Abstract
No abstract availableKeywords
This publication has 23 references indexed in Scilit:
- High‐Throughput and Etch‐Selective Nanoimprinting and Stamping Based on Fast‐ Thermal‐Curing Poly(dimethylsiloxane)sAdvanced Materials, 2007
- Nanoimprint Lithography: Methods and Material RequirementsAdvanced Materials, 2007
- Bulk production of singly dispersed carbon nanotubes with prescribed lengthsNanotechnology, 2005
- Rigiflex Lithography for Nanostructure TransferAdvanced Materials, 2005
- Room‐Temperature, Low‐Pressure Nanoimprinting Based on Cationic Photopolymerization of Novel Epoxysilicone MonomersAdvanced Materials, 2005
- Fabrication of subwavelength aluminum wire grating using nanoimprint lithography and reactive ion etchingMicroelectronic Engineering, 2005
- Nanoscale Protein Patterning by Imprint LithographyNano Letters, 2004
- Fabrication of Size-Controllable Nanofluidic Channels by Nanoimprinting and Its Application for DNA StretchingNano Letters, 2003
- Three-Dimensional and Multilayer Nanostructures Formed by Nanotransfer PrintingNano Letters, 2003
- Imprint Lithography with 25-Nanometer ResolutionScience, 1996