Feasibility of Thin Film Thickness Monitoring by Holographic Interferometry

Abstract
This paper describes a potential technique for dynamically monitoring the thickness of a vacuum deposited thin film by holographic interferometry. This technique does not require the use of high quality optical components, the use of optical quality windows in the vacuum chamber wall, or the use of optically smooth film substrates. Experimental data are presented to substantiate the feasibility of the proposed technique. Several potential applications and the inherent advantages of this measurement method are discussed.