The present state of quantitative X-ray microanalysis Part 2: Computational methods

Abstract

In x-ray microanalysis allowance must be made not only for absorption of x-rays but also for the effects of penetration, diffusion and backscattering of the incident electrons. In view of the impossibility of pursuing separately every electron path, a simplified diffusion model is proposed and calculations based on this are compared with experiment. Agreement is in many cases good, but some discrepancies remain for future investigation.