Rankings
Publications
Search Publications
Cited-By Search
Sources
Publishers
Scholars
Scholars
Top Cited Scholars
Organizations
About
Login
Register
Home
Publications
Monolithic fabrication of nanofluidic artificial gel media for DNA electrophoresis
Home
Publications
Monolithic fabrication of nanofluidic artificial gel media for DNA electrophoresis
Monolithic fabrication of nanofluidic artificial gel media for DNA electrophoresis
ST
Stephen W. Turner
Stephen W. Turner
HC
Harold G. Craighead
Harold G. Craighead
Publisher Website
Google Scholar
Add to library
Cite
Download
Share
Download
26 March 1998
proceedings article
Published by
SPIE-Intl Soc Optical Eng
Vol. 3258
,
114-121
https://doi.org/10.1117/12.304369
Abstract
A new technique for fabricating 2D artificial gels for DNA electrophoresis is presented. The technique differs from previous approaches in that the entire device is fabricated as a monolithic unit using exclusively planar processing techniques borrowed from semiconductor electronics fabrication. The height of the fluid gap between the dielectric floor and ceiling is determined by the thickness of a sacrificial layer which is removed by a wet chemical etch. This allows precise control and excellent uniformity of the gap over an entire silicon wafer. Gap control better than 5 nm has been demonstrated for floor-to-ceiling height for the fluid gap. The lateral resolution which can be attained is limited only by available lithographic techniques. In this work, 1 micrometers diameter pillars are defined with i-line photolithography. Fluid interconnects are established with a liquid meniscus to the hedge of the device.© (1998) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Keywords
FABRICATION
OPTICAL LITHOGRAPHY
SEMICONDUCTORS
SILICON WAFER
ELECTRONICS
CHEMICALS
SILICON
All Articles
Open Access
Cited by 1 article