Characterization of multilayer coatings by X-ray reflection
- 1 January 1988
- journal article
- Published by EDP Sciences in Revue de Physique Appliquée
- Vol. 23 (10), 1687-1700
- https://doi.org/10.1051/rphysap:0198800230100168700
Abstract
Methods to deduce the parameters of a multilayer X-ray mirror from its reflectivity curve are reviewed. Inversion methods are successful for coatings with few layers and give the thickness of each layer and the roughness of each interface. A statistical description of the coating is used for coatings with many layers, and simple formulas are given to derive the average thickness error and boundary roughness in a multilayer mirrorKeywords
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