Porous silicon membranes for gas-sensor applications
- 1 January 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 46 (1-3), 43-46
- https://doi.org/10.1016/0924-4247(94)00858-f
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Optical investigation of porous silicon membranesJournal of Luminescence, 1993
- Porosity and Pore Size Distributions of Porous Silicon LayersJournal of the Electrochemical Society, 1987
- X-ray topographic characterization of porous silicon layersJournal of Crystal Growth, 1984
- Determination of lattice parameter and elastic properties of porous silicon by X-ray diffractionJournal of Crystal Growth, 1984