Multiple Slit Lens for Focusing-Deflection of Charged Particles
- 1 August 1987
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 26 (8R), 1394
- https://doi.org/10.1143/jjap.26.1394
Abstract
The focusing-deflection lens action of a five-slit lens was examined. When the first three pairs and the remaining three pairs of electrodes with central pairs in common were operated as focusing-deflection and focusing lenses, respectively, an incident charged beam could be deflected in good focused condition.Keywords
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