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Exposure of Photoresists: Electron Beam Exposure of Negative Photoresists
Home
Publications
Exposure of Photoresists: Electron Beam Exposure of Negative Photoresists
Exposure of Photoresists: Electron Beam Exposure of Negative Photoresists
BB
Barret Broyde
Barret Broyde
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1 January 1969
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 116
(9)
,
1241
https://doi.org/10.1149/1.2412288
Abstract
No abstract available
Keywords
NEGATIVE PHOTORESISTS
ELECTRON BEAM EXPOSURE
EXPOSURE OF NEGATIVE
Cited by 14 articles