Flow-rate microsensor modelling and optimization using SPICE
- 1 August 1992
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 34 (2), 109-122
- https://doi.org/10.1016/0924-4247(92)80182-3
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Thermally Excited Resonating Membrane Mass Flow SensorSensors and Actuators, 1989