Patterning of Metal Films by Gas Plasma Technique
Open Access
- 5 January 1975
- journal article
- Published by The Electrochemical Society of Japan in Denki Kagaku oyobi Kogyo Butsuri Kagaku
- Vol. 43 (1), 22-27
- https://doi.org/10.5796/kogyobutsurikagaku.43.22