Electron microscopy study of oxidation-induced defects at the silicon-silicon-dioxide interface
- 1 April 1993
- journal article
- Published by Elsevier in Materials Science and Engineering B
- Vol. 18 (3), 269-274
- https://doi.org/10.1016/0921-5107(93)90142-a
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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