Fabrication of nanoelectromechanical systems in single crystal silicon using silicon on insulator substrates and electron beam lithography
- 1 November 1997
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 15 (6), 2760-2763
- https://doi.org/10.1116/1.589722
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystalsApplied Physics Letters, 1996
- Fabrication of a mechanical antireflection switch for fiber-to-the-home systemsJournal of Microelectromechanical Systems, 1996