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Optimization of the geometry of gas-sensitive interdigital capacitors
Home
Publications
Optimization of the geometry of gas-sensitive interdigital capacitors
Optimization of the geometry of gas-sensitive interdigital capacitors
H.-E. Endres
H.-E. Endres
SD
S. Drost
S. Drost
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1 May 1991
journal article
Published by
Elsevier
in
Sensors and Actuators B: Chemical
Vol. 4
(1-2)
,
95-98
https://doi.org/10.1016/0925-4005(91)80182-j
Abstract
No abstract available
Keywords
OPTIMIZATION
SENSORS
DIELECTRIC
SO2
PLANAR
VPM
INTERDIGITAL CAPACITORS
Cited by 99 articles