Abstract: Study of oxidized silicon by angular‐dependent x‐ray photoelectron spectroscopy

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1 January 1977

journal article
Published by American Vacuum Society in Journal of Vacuum Science and Technology

Vol. 14 (1), 376-377
https://doi.org/10.1116/1.569211

Abstract

No abstract available

Keywords

X RAY PHOTOELECTRON SPECTROSCOPY

Cited by 7 articles