Carrier Concentration in Quantum Wires Fabricated by Reactive Ion Beam Etching
- 1 October 1991
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 30 (10R)
- https://doi.org/10.1143/jjap.30.2455
Abstract
High-quality quantum wires with a submicron width are fabricated by a combination of electron beam lithography and selective etching by reactive ion beam etching. The carrier concentrations in these wires are evaluated as a function of gate voltage by analyzing the magnetic depopulation effect observed in the quantum wire resistance. This analysis assumes a parabolic potential profile for the wire constriction. The quantum wire capacitance calculated from the carrier concentration agrees well with the capacitance measured by the 1-MHz capacitance meter. This agreement confirmes that the carrier concentration derived from the magnetoresistance gives a good estimation to the actual quasi 1-dimensional concentration.Keywords
This publication has 8 references indexed in Scilit:
- Fabrication of Quantum Wires by Ga Focused-Ion-Beam Implantation and Their Transport PropertiesJapanese Journal of Applied Physics, 1990
- Reactive Ion Beam Etching Using a Selective Gallium Doping MethodJapanese Journal of Applied Physics, 1989
- Quantum device microfabrication: Resolution limits of ion beam patterningApplied Physics Letters, 1989
- The characterization of high electron mobility transistors using Shubnikov–de Haas oscillations and geometrical magnetoresistance measurementsJournal of Applied Physics, 1989
- Sidewall damage in n+-GaAs quantum wires from reactive ion etchingApplied Physics Letters, 1989
- Phase coherence length of electron waves in narrow AlGaAs/GaAs quantum wires fabricated by focused ion beam implantationApplied Physics Letters, 1989
- Quasi-one-dimensional electron states in a split-gate GaAs/AlGaAs heterostructureSurface Science, 1988
- Observation of Aharonov-Bohm magnetoresistance oscillations in selectively doped GaAs-AlGaAs submicron structuresSolid State Communications, 1987