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Substrate Biasing for Plasma Etching
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Substrate Biasing for Plasma Etching
Substrate Biasing for Plasma Etching
TM
T. D. Mantei
T. D. Mantei
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1 September 1983
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 130
(9)
,
1958-1959
https://doi.org/10.1149/1.2120130
Abstract
No abstract available
Cited by 18 articles