Calculated elastic constants of wide band gap semiconductor thin films with a hexagonal crystal structure for stress problems
- 1 October 1995
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 266 (2), 189-191
- https://doi.org/10.1016/0040-6090(96)80022-8
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Prospects for device implementation of wide band gap semiconductorsJournal of Materials Research, 1992
- Zero-Temperature-Coefficient SAW Devices on AlN Epitaxial FilmsIEEE Transactions on Sonics and Ultrasonics, 1985
- Calculated elastic constants for stress problems associated with semiconductor devicesJournal of Applied Physics, 1973
- Some Elastic Constants of Silicon CarbideThe Journal of the Acoustical Society of America, 1965