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Plasma Processing
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Publications
Plasma Processing
Plasma Processing
FC
Francis F. Chen
Francis F. Chen
JC
Jane P. Chang
Jane P. Chang
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1 January 2003
book chapter
Published by
Springer Nature
p.
99-100
https://doi.org/10.1007/978-1-4615-0181-7_14
Abstract
No abstract available
Keywords
MODELS
PLASMA
FLEXIBILITY
RAPIDLY
FABRICATION
DISCHARGE
SUFFICIENT
SPARY
FLAT
ETCHING
Cited by 3 articles