Sputter Deposition of BiSrCaCuO Thin Films

Abstract

The sputter deposition of superconducting Bi-Sr-Ca-Cu-O thin films was studied with particular reference to the relation between the deposition conditions and the superconducting properties of the films obtained. After annealing, the films sputtered from a sintered Bi_1.3Sr₁Ca₁Cu_1.5O _x target exhibited superconductivity with zero-resistance at 83 K. The possibility of obtaining high-T _c superconducting film without post-deposition annealing was also demonstrated.