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Silicon Nitride from Organosilazane Cyclic and Linear Prepolymers
Home
Publications
Silicon Nitride from Organosilazane Cyclic and Linear Prepolymers
Silicon Nitride from Organosilazane Cyclic and Linear Prepolymers
Barry Arkles
Barry Arkles
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1 January 1986
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 133
(1)
,
233-234
https://doi.org/10.1149/1.2108532
Abstract
No abstract available
Cited by 10 articles